We are using atomiclayerdeposition to achieve this.
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A spatial atomiclayerdeposition apparatus integrated with a modular injector and a linear motor has been designed.
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Second, various metal oxides were directly coated on the resist patterns with low-temperature atomiclayerdeposition (ALD).
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Uniform coating of large-area and 3D substrates is demonstrated owing to the unique self-limiting growth mechanism of atomiclayerdeposition.
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Specifically, Fresnel zone plates were fabricated by combining electron-beam lithography with atomiclayerdeposition and focused ion beam induced deposition.
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Delivery of low-volatility precursors is a continuing challenge for chemical vapor deposition and atomiclayerdeposition processes used for microelectronics manufacturing.
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The dense HSQ nanostructures were used as molds for gold electrodeposition, and the semi-dense HSQ gratings were iridium-coated by atomiclayerdeposition.
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Here we report a strategy to activate the low-temperature performance of Pt catalysts on Cu-modified CeO 2 supports based on redox-coupled atomiclayerdeposition.
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Key to the process will be creating an impenetrable top layer that can withstand water's corrosive effects, by a process known as atomiclayerdeposition.
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The thickness of the Al2O3 spacer layer and of the Pt NPs capped on the ZnO NWs are well controlled by atomiclayerdeposition.