Значения термина atomic layer deposition на английском

We are using atomic layer deposition to achieve this.

A spatial atomic layer deposition apparatus integrated with a modular injector and a linear motor has been designed.

Second, various metal oxides were directly coated on the resist patterns with low-temperature atomic layer deposition (ALD).

Uniform coating of large-area and 3D substrates is demonstrated owing to the unique self-limiting growth mechanism of atomic layer deposition.

Specifically, Fresnel zone plates were fabricated by combining electron-beam lithography with atomic layer deposition and focused ion beam induced deposition.

Delivery of low-volatility precursors is a continuing challenge for chemical vapor deposition and atomic layer deposition processes used for microelectronics manufacturing.

The dense HSQ nanostructures were used as molds for gold electrodeposition, and the semi-dense HSQ gratings were iridium-coated by atomic layer deposition.

Here we report a strategy to activate the low-temperature performance of Pt catalysts on Cu-modified CeO 2 supports based on redox-coupled atomic layer deposition.

Key to the process will be creating an impenetrable top layer that can withstand water's corrosive effects, by a process known as atomic layer deposition.

The thickness of the Al2O3 spacer layer and of the Pt NPs capped on the ZnO NWs are well controlled by atomic layer deposition.